To measure excitation functions of particle-induced prompt gamma-ray production reactions on Li, a thin LiF target was fabricated by thermal evaporation technique onto self-supporting Ag film. The thickness and the ‘, stochiometric’,ratio of the thin LiF target was measured using Elastic ‘, Back scattering’,Spectroscopy (EBS), Particle Induced Gamma-ray Emission (PIGE), and Nuclear Reaction Analysis (NRA) techniques. The target was characterized to check uniformity and its stability under beam bombardment. Carbon and molybdenium contamination in the target also were examinated. The values of the thickness of the target obtained by EBS, PIGE and NRA techniques are in good agreement with each other, within the estimated uncertainties. Measurements were conducted using the proton/deuteron beams of the 3 MV ‘, Van de Graaff’,electrostatic accelerator of Nuclear Science and Technology Research Institute (NSTRI). All results are presented in an absolute approach by using the experimental cross-section values available through the Ion Beam Nuclear Data Library (IBANDL).